If you continue beyond that point, you reach the supercritical phase, where you have something with the density of a liquid but many of the properties of a gas--no surface tension, low viscosity, the ability to diffuse into anything, including the bond that the photoresist forms with the semiconductor wafer
The system's UV wavelength confines the laser beam to the wafer
surface, minimizing false counts from buried defects.
Etsuro Morita, General Manager of SUMCO Production and Technology Division, said, "Our partnership with KLA-Tencor will help us to move to the next-generation of wafer
manufacturing and beyond, where our customers are building nanometer-scale devices on substrates of a higher quality than ever before.
Available in both 200mm and 300mm wafer
sizes, Integral Wafer
utilizes SensArray's existing Thermal Map software application for data display and analysis and the BaseStation and CarrierStation for production deployment and storage.
Up to 21 process modules (42 wafer
process positions) can be configured in any combination, thus permitting virtually limitless process variations to meet changing demands.
ADE Corporation is a leading supplier of metrology and inspection systems for the semiconductor wafer
, semiconductor device, magnetic data storage and optics manufacturing industries.
Silicon-on-Insulator (SOI) refers to a substrate technology where an insulating layer is formed within a silicon wafer
, isolating the thin top layer of silicon where the active transistors will be manufactured from the rest of the silicon substrate.
suppliers and device manufacturers worldwide rely on ADE inspection and measurement systems to certify and ensure the highest quality bare silicon substrates.
Elpida's state-of-the-art semiconductor wafer
manufacturing facilities are located in Hiroshima, Japan.
Separation-by-IMplantation-of-OXygen (SIMOX) refers to a technique used by Ibis for manufacturing SOI wafers
where an oxygen implanter creates a very thin insulating layer within the wafer
, just below a thin layer of silicon on the top of the wafer
A truly unique dimension Cubic Wafer
offers is our ability to bring relevance to Moore's Law using today's technology," said Ed Healy, chief executive officer of Cubic Wafer
These options include special end effectors to address thin, double sided, and glass wafer
handling as well as OCR and barcode readers for wafer
identification and traceability.